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SOI Wafer Silicon On Insulator Semiconductor Wafer

SOI Wafer Silicon On Insulator Semiconductor Wafer

SOI Wafer sizes from 3” to 200mm, some in inventory Ver […]

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Silicon On Insulator Wafer
  • SOI Wafer sizes from 3” to 200mm, some in inventory
  • Very high quality with tight TTV on device layer thickness
  • Direct Si-Si bonding and double sided SOI available
  • Any Si orientation, any device thickness over 1.5um
  • Single and double side polished
  • Small lot sizes and Laser marking of wafers available
  • Short lead time delivery

Product Specification

MethodFusion bonding
DiameterØ 4″/ Ø 6″ / Ø 8″
Device thickness2 um ~ 300 um
Tolerance+/- 0.5 um ~ 2 um
Orientation<100> / <111> / <110> or others
ConductivityP – type / N – type / Intrinsic
DopantBoron / Phosphorous / Antimony / Arsenic
Resistivity0.001 ~ 100000 ohm-cm
Oxide thickness500A ~ 4 um
Tolerance+/- 5%
Handle wafer>= 300 um
SurfaceDouble sides polished
CoatingOxide and nitride can be supplied on both sides of SOI wafer
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SOI wafers are offered with great customizability and the parameters are greatly flexible as per your needs.

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